Clean Room Temperature And Humidity Range

As an example humidity is relative it s relative to the temperature it s at.

Clean room temperature and humidity range.

Humidity control is also impor tant at liquid crystal display plants and paint plants. Usually a fluctuation of 2 degrees celsius is permissible. If you were to set your temperature at 70 degrees and 50 relative humidity at 68 degrees that would be 55 relative humidity. In general the temperature of a cleanroom should be 21 degrees celsius or 69 8 degrees fahrenheit.

Now that you have a better understanding of cleanroom guidelines relating to humidity levels let s take a look at standards for cleanroom temperature. This means that in most facilities the cleanrooms air handling units ahu consume over 60 of all the site power. That translates again into the cost of construction and the cost of operating your clean room. Clean rooms need a lot of air and usually at a controlled temperature and humidity.

In this case the durability and accuracy of the humidity sensor is very important. Relative humidity is one of the environmental conditions usually specified for cleanroom operations. Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range and with tolerances as narrow as 1 percent for some areas such as photolithography or even less for deep ultraviolet processing duv and relaxing to. Looking at cleanroom temperature.